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Back-End Cluster
Features:
• Complete modular construction
• Flexible back-end integrated
line / segmented line; no constraint due to various
•
process requirements
• Standard process modules as
basic building blocks
• Flexible, able to integrate
third-party modules, e.g. laser mark; inspection module
and
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test handling module
• SECS and GEM compliant
• Applications: All
leaded packages, e.g. QFN (punched type), SO,
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TQFP, TSSOP and many others
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